Semi-conductor General Information

 Features
  • Clean & Environmentally Benign.
  • Minimizes Collateral Damage.
  • Saves money and time for decontamination.
  • Minimizes Downtime.
  • Safe for humans.
  • Corrosion resistant, PVDF or PFA throughout.

Water Mist offers the ideal fire protection for the high technology semiconductor equipment. The use of de-ionized water and nitrogen to create very fine water droplets eliminates the risk of contamination of the process and products, therefore saving thousands of dollars in decontamination and downtime.

The FIRE-SCOPE® 2000 Water Mist System has been proven to extinguish fires in seconds even in the most severe flammable liquid processes. The low pressure and the fine droplets used present no danger of splashing and are safe for personnel.

The low-pressure Water Mist system is installed within the process tools using clean room compatible plastics which reduce the risk of contamination. This approved system can be installed on a variety of semiconductor production equipment such as:

  • Open face wet benches
  • Mini-environments
  • Plating machines
  • Spin dryers
  • Solvent tools
  • Flammable liquid baths

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SECURIPLEX has provided fire protection for the Semiconductor Industry since 1996. Since then, they have continued to develop the technology in response to the industry’s particular demands. Hundreds of semiconductor tools are protected today with the SECURIPLEX LLC state of-the-art Water Mist fire protection system. Safe for humans and safe for your process, it is the ultimate solution for clean room environment protection.

SECURIPLEX is a leader in the Water Mist fire protection technology. SECURIPLEX LLC is at the forefront of the industry in the development of efficient fire protection solutions for the industrial markets (protecting hundreds of turbine generators, transformers, diesel generators, pumps and more) as well as more specialised equipment such as clean room tools.

Our team of engineers and specialists will work with you to design the most cost efficient solution without compromising the protection of personnel, equipment and property.